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High Purity Nitrogen Trifluoride NF3 Gas Supplier

CAS No.:7783-54-2
Other Names:nitrogen trifluoride
EINECS No.:232-007-1
Place of Origin:Hangzhou, China (Mainland)
Grade Standard:Industrial Grade
Appearance:Colorless Liquid

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Products Details


Product Description


Nitrogen trifluoride(NF3) is a new special gas for electronic industry as cleaning gas for plasma cleaning and etching,widely used in TFT-LCD, semiconductor and solar photoelectricity industry etc.,having advantages of no remaing, high cleaning speed and easy to decompose. 


Product Parameters


Nitrogen trifluoride Chemical Properties

Melting point

−207.15 °C (−340.87 °F; 66.00 K)

Boiling point

−129.06 °C (−200.31 °F; 144.09 K)

Vapor pressure

>1 atm (20°C)

Solubility in water

0.021 g/100 mL


3.003 kg/m3 (1 atm, 15 °C)
1.885 g/cm3 (liquid at b.p.)


Product Applications

1. Nitrogen trifluoride is used as a high-speed, selective etchant in silicon processing. It is used to etch silicon, polysilicon, silicon nitride and silicon oxide as well as refractory metals and silicides.

  1. Nitrogen trifluoride is used in cleaning chemical vapour reaction chambers for solar cell and LED screen production.


  1. Nitrogen trifluoride has recently become of interest as a nitrogen source in generating nitride layers by chemical vapour deposition.


  1. Nitrogen trifluoride is sometimes used as the fluorine source in HF/DF (see page XYZ) chemical lasers.


  1. Nitrogen trifluoride is used as a fluorinating agent. 


  1. Nitrogen trifluoride is also used for fibre treatment.         





Packaging & Delivery


Packaging Details

By seamless steel gas cylinder, drum, tube trailer, ISO tank or as demands

Delivery Time

25-30 days after getting PO and deposit confirmed.


Our Services

  • More than 38 years experience in gas industry
  • Strict quality control system
  • Strong supply ability
  • Quick delivery and good service
  • Pass the ISO 9001:2015 Certificate



  1. What's your product price?

   Because each gas price is depends on the market supply and demand, quantity and  

   purity, it is difficult to give a fixed price. If you have any interested in each gas, pls give

   your details requirement. I could like to make an offer to you.


  1. What’s the min order?

   Different products have different min order. Please don’t hesitate to let me know your



  1. What’s the delivery time?

   If the cylinder is in the stock, and only need to fill gas, the delivery is about 10-15days

   ex work after receive the deposit.

   If the cylinder need to customize, the delivery is about 25-35 days ex work after receive  the deposit. That is depends on the quantity.


  1. How to check the gas quality?

   Firstly, our cylinder will take a treatment (cleaning, drying, vacuum pumping, and

   replacement before filling gas. In this way, the cylinder inside is clear and dry.

   Secondly, we will take tests every treated cylinder to assure them inside purity. Thirdly,

   we will take a test for all of the gas after fill into cylinders. If the tested gas is not up to

   standard, we will produce it again and not release the faulty product to ex work. At last,

   we will supply you the gas test qualified report .


  1. All the cylinders can recycle?

   Usually seamless steel cylinder can recycle to use in 20 years. The disposable cylinder

   is only for use one time.


  1. Shall we send back the cylinders to China to refill gas again?

Yes, when you ordered our cylinders, next time, you can send back the cylinders to fill

gas again. You just need to tell us before you export. We will handle all the import

customs clearance formalities.